W06.1.3 FeRAM

Start
End
Speaker
Laurent Grenouillet, CEA-Leti, France

Perovskite-based Ferroelectric Random Access Memories (FeRAM) cannot scale beyond 130nm and offer poor CMOS compatibility. The discovery of hafnia-zirconia-based films changed FeRAM paradigm about 15 years ago.  This talk will cover HZO-based FeRAM demonstrations from 130nm down to 22nm node, highlighting the opportunities and challenges related to this promising technology.